Multistage Micropump System towards Vacuum Pressure

Fraunhofer EMFT’s research and manufacturing portfolio includes piezoelectrically actuated silicon micro diaphragm pumps with passive flap valves. Research development in the field of microfluidics have been dedicated for many years to use micropumps generating positive negative pressures, as well delivering various media. However, some applications, only small amounts fluid need be pumped, compressed, or evacuated, until now, macroscopic high power consumption able achieve necessary flow rate pressure, especially compressible media such air. To address these requirements, one potential approach is a multistage high-performing optimized pressure. In this paper, we present several possible ways cascade piezoelectric valves stringent requirements. Initially, simulations are conducted generate pressures different cascading methods. The first option assumes pressure equalization over piezo-actuator by upstream pump, while second case, actuator operates against atmospheric Subsequently, measurement results generation gas down −82.1 kPa relative (19.2 absolute) three presented. This enables further miniaturization applications high-performance requirements micropumps, achievable systems.